UV FLOOD EXPOSURE SYSTEMS

B&A offers a variety of high performance, collimated, and uncollimated UV Flood Exposure Systems. These systems are enhancing many of the photolithographic processes used by the Microelectronics Industry.
These exposure systems are designed for use in production as well as R&D applications. Near, Mid, and Deep UV systems are available with a variety of standard and optional features including beam sizes to 16" (400mm), intensity controlling powersupplies, and up to 2,000W capability.
The system's exposure optics employ a proven, high performance optic train that employs an elliptical reflector, a multi-element optical integrator system, heat removing primary and secondary mirrors, and output optics.

 Features and Options  Typical Applications
  • High Efficiency, Uniform, Lightsource
  • SystemsNear, Mid and Deep UV Versions
  • 200W to 2,000W Systems
  • Regulated, Power-adjustable and Intensity Controlling Powersupply Systems
  • Shutter Controller
  • High Rel, Low Maintenance Design
  • PCM Processes
  • Photoresist Stabilization
  • Edge Bead Exposure
  • Photoresist Modification
  • Image Reversal
UV Exposure System with Rotation

TYPICAL TECHNICAL SPECIFICATIONS
   Near UV Systems  Deep UV Systems
 Beam Sizes
 100mm - 400mm
100mm - 200mm
 Beam Divergences
 As Required
 As Required
 Beam Uniformity
Standard Systems
Diameters: To +/- 5%
Squares: To +/- 6%
Diameters: To +/- 5%
Squares: To +/- 6%
  Beam Spectrum
  340nm - 450nm
220nm - 260nm
240nm - 275nm
265nm - 325nm
 DUV GRID EXPOSURE SYSTEMS
 Beam Sizes
100mm - 400mm
100mm - 400mm
 Process Uniformity
Better than +/- 2%
Better than +/- 2%
 Beam Spectrum
365 - 436nm
254nm - 436nm
  Intensity
8mW/cm2 @ 365nm
14 - 15 mW/cm2 @ 254nm

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B&A Home Page

Optical Components

Chucks/Mask Holders

Optical Filters

Optical Filters/Coatings

Glass/Metal Reflectors

UV Mirrors

Collimating Lenses

Arc Lamps

Arc Lamp Powersupplies

UV Powermeters

  UV Exposure Systems

For additional technical information and pricing contact us at...

Tel: (408) 988-5861
Fax: (408) 988-2754
Email: sales@bachur-n-associates.com