
| Near UV Systems | Deep UV Systems | |
Beam Sizes |
100mm - 400mm |
100mm - 200mm |
Beam Divergence |
2.6 deg. - 1.3 deg. |
2.6 deg. - 2.3 deg. |
Beam Uniformity
|
Diameters +/- 5%
|
Diameters +/- 5%
|
Beam Spectrum |
340nm - 450nm |
220nm - 260nm
|
Intensity @ 200W, 100mm Dia. |
10 mW/cm2 (UV365)
|
NA |
Intensity @ 350W, 100mm Dia. |
18 mW/cm2 (UV365)
|
NA |
Intensity @ 500W, 100mm Dia. |
25 mW/cm2 (UV365)
|
10 - 12 mW/cm2 (DUV220)
|
Intensity @ 1,000W, 100mm Dia. |
50 mW/cm2 (UV365)
|
20 - 24 mW/cm2 (DUV220)
|
Intensity @ 2,000W, 100mm Dia. |
100 mW/cm2 (UV365)
|
40 - 44 mW/cm2 (DUV220)
|