UV LIGHTSOURCES AND UV EXPOSURE SYSTEMS

B&A offers a variety of high performance, collimated UV Lightsources and UV Exposure Systems. These systems are used for fine line patterning as well as the enhancement of many UV photolithography processes employed by the Microelectronics Industry.
These UV systems are designed for production use as well as R&D applications. Near, Mid, and Deep UV systems are available with a variety of standard and optional features including beam sizes to 16" (400mm), intensity controlling powersupplies, and up to 2,000W capability.

The System's Optics...
The system's UV optics employ a proven, high performance optic train that include an elliptical reflector, dielectric heat removing primary and secondary mirrors, a multi-element optical integrator system and collimating optics. The system's optical integrator system produces uniformity and non-coherent radiation that virtually eliminates the detrimental effects of diffraction. These high intensity systems can resolve fine structures even in thick photosensitive materials.

 Features and Options  Typical Applications
  • High Efficiency, Uniform, Lightsource
  • SystemsNear, Mid and Deep UV Versions
  • 200W to 2,000W Systems
  • Intensity Controlling Powersupply Systems
  • Shutter Controller
  • High Rel, Low Maintenance Design
  • Excellent Documentation
  • Ultra Clean Robotic Handling (optional)
  • Photoresist Patterning
  • Photoresist Stabilization
  • Edge Bead Exposure
  • Photoresist Modification
  • Image Reversal
  • PCM Processes
UV Exposure System with Rotation

TYPICAL TECHNICAL SPECIFICATIONS
   Near UV Systems  Deep UV Systems
 Beam Sizes
 100mm - 400mm
100mm - 200mm
 Beam Divergences
 2.6 deg. - 1.3 deg.
2.6 deg. - 2.3 deg.
 Beam Uniformity
Standard Systems
 Diameters +/- 5%
Squares +/- 6%
Diameters +/- 5%
Squares +/- 6%
 Beam Uniformity
Hi-Uniformity Systems
 Diameters +/- 2.5%
Squares +/- 3.5%
Diameters +/- 2.5%
Squares +/- 3.5%
  Beam Spectrum
  340nm - 450nm
 220nm - 260nm
240nm - 275nm
 Intensity @ 200W, 100mm Dia.
16 mW/cm2 (UV365)
34 mW/cm2 (UV400)
 NA
 Intensity @ 350W, 100mm Dia.
28 mW/cm2 (UV365)
60 mW/cm2 (UV400)
 NA
 Intensity @ 500W, 100mm Dia.
40 mW/cm2 (UV365)
85 mW/cm2 (UV400)
17 mW/cm2 (DUV220)
20 mW/cm2 (DUV260)
 Intensity @ 1,000W, 100mm Dia.
77 mW/cm2 (UV365)
170 mW/cm2 (UV400)
30 mW/cm2 (DUV220)
36 mW/cm2 (DUV260)
  Intensity @ 2,000W, 100mm Dia.
150 mW/cm2 (UV365)
320 mW/cm2 (UV400)
60 mW/cm2 (DUV220)
70 mW/cm2 (DUV260)

Go To....

B&A Home Page

Optical Components

Chucks/Mask Holders

Optical Filters

Optical Filters/Coatings

Glass/Metal Reflectors

UV Mirrors

Collimating Lenses

Arc Lamps

Arc Lamp Powersupplies

UV Power Meters

Flood Exposure Systems

For additional technical information and pricing contact us at...
Tel: (408) 988-5861
Fax: (408) 988-2754
Email: sales@bachur-n-associates.com